“二氟化氙蚀刻机,XEF2,XEF2蚀刻机”详细信息
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百腾科技(苏州)有限公司
Xef2 Etcher is a system for isotropic silicon etching by XeF2 vapour.
It offers a cost-effective solution for removal of silicon as a sacrificial layer and its removal by XeF2 is the best-released process ever used for MEMS devices.
Besides the silicon layer, Xef2 Etcher also etches Ta, W, Mo and other materials, which can be etched by SF6 plasma. We can custom made your system according to your requirement.
Key features
The etching is very gentle process, with no plasma involved.
Etching of silicon is gas (vapor) process, and there is no liquid involved and therefore the notoriously known sticking problem is completely eliminated.
The implementation of a XeF2 process brings another advantage over the conventional MEMS release processes. It can be done at chip level even after packaging. The consequence is truly incredible. Penta Technology (Suzhou) Co., Ltd
欢迎来到百腾科技(苏州)有限公司网站,我公司位于园林景观其*特,拥有 “中国园林之城”美称的苏州市。 具体地址是
江苏苏州工业园区唯新路168号北门唯和路,负责人是王丽容。
主要经营派瑞林真空气相沉积镀膜机、Xef2蚀刻机、System溅射机、聚对二甲苯原料供应、精密镀膜Parylene Coating加工Conformal Coating。
单位注册资金单位注册资金人民币 250 - 500 万元。
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